Flexible single-crystal silicon nanomembrane photonic crystal cavity.

نویسندگان

  • Xiaochuan Xu
  • Harish Subbaraman
  • Swapnajit Chakravarty
  • Amir Hosseini
  • John Covey
  • Yalin Yu
  • David Kwong
  • Yang Zhang
  • Wei-Cheng Lai
  • Yi Zou
  • Nanshu Lu
  • Ray T Chen
چکیده

Flexible inorganic electronic devices promise numerous applications, especially in fields that could not be covered satisfactorily by conventional rigid devices. Benefits on a similar scale are also foreseeable for silicon photonic components. However, the difficulty in transferring intricate silicon photonic devices has deterred widespread development. In this paper, we demonstrate a flexible single-crystal silicon nanomembrane photonic crystal microcavity through a bonding and substrate removal approach. The transferred cavity shows a quality factor of 2.2×10(4) and could be bent to a curvature of 5 mm radius without deteriorating the performance compared to its counterparts on rigid substrates. A thorough characterization of the device reveals that the resonant wavelength is a linear function of the bending-induced strain. The device also shows a curvature-independent sensitivity to the ambient index variation.

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عنوان ژورنال:
  • ACS nano

دوره 8 12  شماره 

صفحات  -

تاریخ انتشار 2014